Field Service Engineer (Plasma Technology) Midwest Region

Oxford Instruments Plc•Chicago, IL
•$95,000 - $115,000•Remote

About The Position

Oxford Instruments Plasma Technology is hiring a customer-facing Field Service Engineer to support customers using advanced semiconductor plasma etch and deposition systems. The role involves installing, commissioning, maintaining, troubleshooting, and optimizing systems, while providing technical guidance and responsive service to support customer satisfaction and equipment performance. This is a remote role based in the Chicago or Midwest region. Candidates elsewhere in the U.S. may apply if willing to relocate to the Midwest. The engineer must live within approximately 60 minutes of a major airport and travel extensively to customer sites across North America. The position requires approximately 90% travel, Monday through Friday. The expected salary for this full-time, benefited position is $95,000–$115,000. Oxford Instruments describes its compensation package as competitive and offers comprehensive benefits, but does not specify the individual benefits in the posting.

Requirements

  • Bachelor's degree in Electrical Engineering, Mechanical Engineering, Physics, or a related technical discipline; equivalent semiconductor equipment service experience will also be considered.
  • 3–5 years of field service experience within the semiconductor industry.
  • Strong experience supporting plasma etch and/or deposition equipment.
  • Familiarity with cleanroom environments and semiconductor manufacturing processes.
  • Hands-on experience with vacuum systems, including turbo, cryo, and roughing pumps.
  • Experience troubleshooting 208V electrical systems and 24V control circuits.
  • Strong understanding of RF power systems and inductively coupled plasma (ICP) technology.
  • Working knowledge of semiconductor processes including RIE, PECVD, ICP, and ALD.
  • Ability to interpret electrical, mechanical, pneumatic, and process schematics.
  • Experience using diagnostic and calibration tools in a semiconductor environment.
  • Valid driver's license and passport, and ability to travel independently.
  • Ability to travel extensively (90%) Monday through Friday across North America.
  • Comfort working in cleanroom environments and confined spaces.
  • Ability to safely lift and handle equipment weighing up to 50 lbs.
  • Strong manual dexterity and attention to detail.
  • Ability to solve challenging technical problems, deliver outstanding customer service, communicate clearly, and build strong customer relationships.
  • Ability to thrive independently and in team-based environments, with adaptability, initiative, commitment to continuous learning, and high standards of organization, safety, and professionalism.

Nice To Haves

  • Familiarity with other similar platforms, vacuum systems, and components.
  • Experience calibrating and optimizing APCs and MFCs.
  • Knowledge of advanced vacuum and process control technologies.

Responsibilities

  • Lead installation and commissioning of plasma etch and deposition systems, including RIE, ICP, CVD, ALD, ALE, and ICP-CVD technologies.
  • Ensure systems meet customer specifications, process requirements, and cleanroom standards, and support customer acceptance.
  • Perform preventive and corrective maintenance on semiconductor equipment.
  • Diagnose technical issues, determine root causes, implement lasting solutions, and validate repairs against vacuum, process, and performance specifications.
  • Serve as a technical advisor to customers and provide operator training and technical guidance.
  • Provide responsive customer support, including remote support when needed, to minimize downtime and maintain customer satisfaction.
  • Troubleshoot hardware, electrical, vacuum, RF, pneumatic, and software-related issues.
  • Use diagnostic equipment such as vacuum leak detectors, RF power meters, DVMs, LCR meters, and multimeters.
  • Perform system calibrations, upgrades, and performance enhancements.
  • Support installation of components including pumps, RF generators, APCs, MFCs, PLCs, and control systems.
  • Maintain accurate service documentation and share knowledge across teams.

Benefits

  • Comprehensive benefits
  • Competitive compensation package
© 2026 Teal Labs, Inc
Privacy PolicyTerms of Service