Sr. Field Service Engineer

Plasma-Therm LLC•Livermore, CA

61d

About The Position

The Senior Field Service Engineer IV (FSE IV) is a lead technical expert responsible for installation, startup, advanced troubleshooting, preventive maintenance, upgrades, and customer support for Quazar Ion Beam systems used in advanced semiconductor processing environments. The role supports ion beam etch and related beamline-based equipment, helping ensure safe and reliable tool performance while providing technical leadership during customer escalations, tool-down events, and field-driven corrective actions. The position requires hands-on expertise with high-vacuum systems, ion source operation, beam tuning, RF/DC power delivery, electrostatic and magnetic beam control, gas delivery, motion and robotics, endpoint and process control, and complex electromechanical troubleshooting. The FSE IV works with engineering, manufacturing, customer fab teams, facilities teams, process engineers, and contractors on product readiness, installation, commissioning, maintenance, and issue resolution. The role includes domestic and international travel as required, along with participation in an on-call rotation.

Requirements

Associate’s or Bachelor’s degree in Electrical Engineering, Mechanical Engineering, Chemical Engineering, Mechatronics, Semiconductor Technology, or equivalent military technical experience.
At least 8 years of direct field service or equipment engineering experience in semiconductor capital equipment manufacturing or advanced wafer fabs.
Deep knowledge of ion source operation, beam extraction and tuning, beamline components, neutralization, gas delivery, endpoint/process monitoring, chamber conditioning, and process-impacting hardware variables.
Proficiency with turbomolecular and dry pumps, vacuum gauges, leak checking, RF/DC generators, matching networks, high-voltage power supplies, and related safety practices.
Hands-on experience reading complex electrical schematics, vacuum diagrams, gas delivery schematics, interlock logic, PLC/HMI screens, and software diagnostic logs.
Strong working knowledge of cleanroom safety, high-voltage/RF safety, compressed and process gas safety, vacuum safety, robotics safety, and LOTO procedures.
Exceptional written and verbal communication skills for customer escalation management.
Strong problem-solving skills using structured methodologies such as 8D and 5 Whys.
Ability to work independently in a fast-paced fab environment and handle high-pressure customer situations.
Ability to work in semiconductor cleanrooms while wearing required gowning and PPE.
Ability to lift up to 50 lbs, bend, stoop, and stand for extended periods.
Flexibility to travel domestically and internationally as required and participate in on-call rotations.

Nice To Haves

Prior experience with ion beam etch, ion milling, ion implantation, dry etch, or other beamline/high-vacuum semiconductor processing equipment.
Prior experience working in high-volume 200mm or 300mm wafer fabrication facilities.
Familiarity with Jira, ERP systems, service case management tools, and field action tracking processes.

Responsibilities

Complete hands-on training on Quazar Ion Beam system architecture, subsystem operation, maintenance procedures, safety requirements, and field service best practices.
Work with engineering and manufacturing teams during system build, configuration, testing, and initial tool integration.
Help capture, review, and refine service procedures, preventive maintenance protocols, commissioning checklists, and troubleshooting guides.
Lead and support on-site tool move-in and set-in-place activities, facility hookup verification, chamber preparation, vacuum pump-down, and system power-on for installations.
Execute pre-commissioning checks, interlock verification, gas flow validation, vacuum integrity checks, ion source startup, beam tuning support, and Final Acceptance Testing (FAT).
Coordinate with customer fab engineers, facilities teams, process engineers, and rigging contractors to maintain installation schedules and resolve startup issues.
Perform preventive and unscheduled corrective maintenance on Quazar Ion Beam systems in accordance with customer response-time expectations.
Lead root-cause failure analysis for escalations involving ion sources, beam stability, RF/DC power, gas delivery, high vacuum, wafer handling, motion control, cooling, safety interlocks, and electromechanical systems.
Author and drive 8D Quality/Failure Reports to closure with engineering, manufacturing, technical support, and customer stakeholders.
Act as the primary technical point of contact during critical tool-down scenarios and provide customer fab management with status updates, next steps, risks, and recovery plans.
Follow customer safety, cleanroom, high-voltage, RF, vacuum, gas-handling, and Lockout/Tagout (LOTO) protocols.
Mentor and train peer engineers and contribute to internal SOPs, troubleshooting guides, service reports, and training logs.
Travel for product training, customer installations, escalations, and field support, and participate in on-call rotations as customer demand dictates.