Sr. Field Service Engineer

Plasma-Therm LLC•Mesa, AZ

93d•Onsite

About The Position

The Senior Field Service Engineer IV serves as a lead technical expert responsible for installation, startup, advanced troubleshooting, preventive maintenance, and modification of advanced semiconductor capital equipment. Supporting a strategic OEM partnership, the role provides on-site service at a leading-edge semiconductor manufacturing facility in the Phoenix area across wet processing and wet etch platforms as well as Plasma-Therm plasma processing equipment, including PECVD and dry etch systems. The position includes factory training in Taiwan on new pre-release wet processing platforms, collaboration with factory development engineers, and support for creating procedures and commissioning materials for field deployment. In Phoenix, the engineer leads tool installation and commissioning, performs maintenance and complex failure analysis, and manages customer escalations. The role also mentors peer engineers and ensures compliance with customer safety, cleanroom, chemical-handling, and Lockout/Tagout requirements. Local fab support includes an on-call rotation and limited domestic and overseas travel.

Requirements

Associate’s or bachelor’s degree in Electrical Engineering, Mechanical Engineering, Mechatronics, or Semiconductor Technology, or equivalent military technical training or experience.
At least 8 years of direct field service or equipment engineering experience in semiconductor capital equipment manufacturing or advanced wafer fabs.
Deep knowledge of liquid chemical delivery systems, high-purity chemical plumbing and valves (PFA/PVDF), dosing pumps, chemical inline heating and chilling, bath recirculation, flow meters, and liquid filtration.
Proficiency with vacuum systems, including turbomolecular and dry pumps and vacuum gauging, and with electromechanical assemblies.
Hands-on experience reading complex electrical schematics, Piping & Instrumentation Diagrams (P&IDs), fluidic schematics, and software diagnostic logs.
Strong working knowledge of cleanroom safety, hazardous chemical handling, chemical spill protocols, and Lockout/Tagout procedures.
Exceptional written and verbal communication skills for customer escalation management.
Problem-solving skills using structured methodologies such as 8D and 5 Whys.
Ability to work independently in a fast-paced fab environment and handle high-pressure customer situations.
Ability to work varied shifts, including weekend coverage or emergency on-call rotations as customer demand dictates.
Ability to work in a Class 10/100 semiconductor cleanroom while following full bunny suit protocol.
Ability to lift up to 50 pounds, bend, stoop, and stand for extended periods.

Nice To Haves

Prior experience with Plasma-Therm equipment, such as Kobus PECVD, plasma etch, PVD, or evaporator systems.
Prior experience working in high-volume 300mm wafer fabrication facilities.
Familiarity with enterprise tracking tools such as Jira, Confluence, or ERP platforms for tracking service cases, tool serial numbers, and field actions.

Responsibilities

Complete hands-on factory training at the strategic partner’s manufacturing facility in Taiwan on new pre-release wet processing and wet etch platforms.
Work with factory development engineers on sub-assembly, software configuration, and initial tool integration.
Capture, review, and refine standard operating procedures, maintenance protocols, and commissioning checklists for field deployment.
Lead and oversee tool uncrating, rigging supervision, facility chemical and utility hookup verification, and system power-on for new tool deliveries in Phoenix.
Perform pre-commissioning checks, sensor calibrations, fluid delivery testing, and Site Acceptance Testing (SAT).
Coordinate with customer fab engineers, facility chemical engineering teams, and rigging contractors to maintain installation schedules.
Perform preventive and corrective maintenance across wet etch systems and Plasma-Therm dry processing platforms under stated service-level response guidelines.
Lead root-cause failure analysis for chemical delivery, fluidic valves, heater control, robotic wafer transfer, vacuum, and electromechanical issues.
Author and drive 8D quality and failure reports to closure with factory engineering teams in Taiwan and domestic headquarters.
Act as the primary technical contact during critical tool-down scenarios and provide daily technical updates to customer fab management.
Follow customer EHS, cleanroom, chemical-handling, and Lockout/Tagout protocols.
Mentor and train peer engineers and support development of internal SOPs and training logs.