Summer 2027 - Process Simulation Engineering Intern - MS/PhD

Lam Research•Fremont, CA
•$30 - $48•Hybrid

About The Position

As a Process Simulation Engineering Intern in the Office of the CTO, you will help build a virtual twin of plasma etch processes. You will develop physics-based models of plasma etching and fast machine-learning surrogate models that connect tool settings to predicted feature profiles. The work supports data-driven process development for Lam’s etch products. The position is an onsite-flex role, with at least three days per week onsite. The internship includes documenting the workflow and presenting results at its conclusion.

Requirements

  • Currently pursuing an MS or PhD in chemical engineering, physics, materials science, chemistry, or a related field.
  • Strong Python skills, including hands-on experience building and training models in PyTorch or a similar framework such as JAX or TensorFlow.
  • Background in reaction kinetics, transport phenomena, or surface/plasma science.
  • Hands-on experience building machine-learning or regression models.
  • Strong analytical and communication skills, and ability to work effectively in a team.

Nice To Haves

  • Coursework or research in plasma physics or plasma-surface interactions.
  • Experience with surrogate modeling methods such as Gaussian processes, neural networks, polynomial chaos, or reduced-order models.
  • Experience with GPyTorch/BoTorch, physics-informed neural networks, or uncertainty quantification.
  • Experience with design of experiments, sensitivity analysis, Bayesian calibration, or optimization.
  • Experience with physics-based simulation tools such as finite element, Monte Carlo, or feature-scale/profile simulators.
  • Familiarity with semiconductor etch processes or SEM/TEM image analysis.

Responsibilities

  • Build and refine models of plasma etching, including ion and neutral species interactions with wafers, sticking and reaction probabilities, redeposition, and ion energy and angle effects.
  • Calibrate model parameters against measured profiles, such as critical dimension versus depth from SEM/TEM images.
  • Design simulation experiments, including parameter sweeps and design of experiments, to generate training data.
  • Build and validate fast surrogate models of slower physics simulations, including evaluating accuracy and uncertainty.
  • Use surrogate models to identify influential settings and optimize process conditions.
  • Write Python tools to automate simulation runs, data processing, and plotting.
  • Document the workflow and present results at the end of the internship.

Benefits

  • Comprehensive benefits package described as supporting employees throughout phases of life.
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