Senior PECVD Process Engineer

Coherent • Sherman, TX

7d • Onsite

About The Position

Serve as the process owner for PECVD, developing, sustaining, and optimizing processes for GaAs and InP device manufacturing. Conduct process characterization and troubleshooting, working cross-functionally with R&D, production, and equipment teams. Apply Statistical Process Control (SPC) and Design of Experiments (DOE) to monitor and improve process stability and yield. Interface with equipment vendors to evaluate tool performance and upgrades. Serve as the technical owner for PECVD equipment and associated metrology. Lead troubleshooting efforts for process deviations, equipment issues, and yield excursions. Work with equipment vendors and maintenance personnel to improve tool performance, reliability, and uptime. Support equipment qualification, preventive maintenance, and continuous improvement activities. Support automated recipe download and verification for production tools. Work with automation and equipment teams to ensure correct recipe selection, parameter control, and lot tracking. Develop and maintain process limits, alarms, interlocks, and fault detection rules. Review tool and process data to identify trends, excursions, and early indicators of equipment or process issues. Support fault detection and classification systems to improve process control, reduce scrap, and prevent repeat excursions. Participate in automation improvements that improve tool utilization, data collection, traceability, and manufacturing consistency. Perform failure analysis and defect characterization to identify root causes of process variation. Develop and implement process improvements to increase yield, improve film quality, and reduce defectivity. Lead continuous improvement initiatives focused on productivity, equipment utilization, and process capability. Develop and maintain process documentation, work instructions, FMEAs, process specifications, and control plans. Train technicians and junior engineers on equipment operation, process control, troubleshooting, and best practices. Support new equipment installations, process qualifications, and technology transfers.

Requirements

• Bachelor’s or Master’s degree in Materials Science, Chemical Engineering, Electrical Engineering, or related field.
• 5+ years of experience in semiconductor PECVD or thin films process engineering.
• Strong understanding of SiNx, SiOx, and other PECVD films, including the relationship between process parameters, gas chemistry, plasma conditions, chamber conditioning, clean cycles, and resulting film properties.
• Experience with thin-film metrology including ellipsometry, reflectometry, profilometry, FTIR, stress/bow measurement, SEM, or similar techniques.
• Experience in optimizing film thickness, RI, deposition rate, uniformity, stress, and film composition.
• Ability to work on-site in a semiconductor manufacturing and cleanroom environment.
• Ability to provide off-hours support as needed for critical manufacturing or equipment issues.
• Solid background in SPC, Gage R&R, DOE, and root cause analysis.
• Proficient in JMP, Excel, and other Microsoft Office software.
• Excellent documentation, troubleshooting, and communication skills.

Nice To Haves

• Experience with MES systems (e.g., Camstar) is a plus.
• Direct GaAs and/or InP process experience is highly desirable.
• Experience with high-volume semiconductor manufacturing.
• Knowledge of additional fab areas such as photolithography, etch, or metals.
• Familiarity with device-level impacts of film properties and process integration.

Responsibilities

• Serve as the process owner for PECVD, developing, sustaining, and optimizing processes for GaAs and InP device manufacturing.
• Conduct process characterization and troubleshooting, working cross-functionally with R&D, production, and equipment teams.
• Apply Statistical Process Control (SPC) and Design of Experiments (DOE) to monitor and improve process stability and yield.
• Interface with equipment vendors to evaluate tool performance and upgrades.
• Serve as the technical owner for PECVD equipment and associated metrology.
• Lead troubleshooting efforts for process deviations, equipment issues, and yield excursions.
• Work with equipment vendors and maintenance personnel to improve tool performance, reliability, and uptime.
• Support equipment qualification, preventive maintenance, and continuous improvement activities.
• Support automated recipe download and verification for production tools.
• Work with automation and equipment teams to ensure correct recipe selection, parameter control, and lot tracking.
• Develop and maintain process limits, alarms, interlocks, and fault detection rules.
• Review tool and process data to identify trends, excursions, and early indicators of equipment or process issues.
• Support fault detection and classification systems to improve process control, reduce scrap, and prevent repeat excursions.
• Participate in automation improvements that improve tool utilization, data collection, traceability, and manufacturing consistency.
• Perform failure analysis and defect characterization to identify root causes of process variation.
• Develop and implement process improvements to increase yield, improve film quality, and reduce defectivity.
• Lead continuous improvement initiatives focused on productivity, equipment utilization, and process capability.
• Develop and maintain process documentation, work instructions, FMEAs, process specifications, and control plans.
• Train technicians and junior engineers on equipment operation, process control, troubleshooting, and best practices.
• Support new equipment installations, process qualifications, and technology transfers.

Benefits

• Coherent Corp. is an equal opportunity/affirmative action employer. All qualified applicants will receive consideration for employment without regard to sex, gender identity, sexual orientation, race, color, religion, national origin, disability, protected Veteran status, age, or any other characteristic protected by law.

What This Job Offers

• Job Type: Full-time
• Career Level: Senior