Senior Metrology Process Engineer

Coherent•Sherman, TX

6d•Onsite

About The Position

Serve as the process owner for semiconductor metrology, developing, sustaining, and optimizing measurement methods for production and process development. Develop and optimize measurement recipes for ellipsometry, spectroscopy, reflectometry, profilometry, WLI, Nanospec, and other metrology systems. Develop measurement methods for film thickness, RI, surface topography, step height, feature dimensions, wafer bow, and other critical process parameters. Establish appropriate measurement locations, sampling plans, and measurement strategies to ensure accurate and representative process data. Apply SPC, DOE, and statistical analysis to monitor and improve measurement and manufacturing processes. Work cross-functionally with photo, etch, thin films, wet process, integration, R&D, and production teams to develop measurement solutions and troubleshoot process issues.

Requirements

Bachelor’s or Master’s degree in Materials Science, Electrical Engineering, Chemical Engineering, Physics, or a related technical field.
5+ years of semiconductor metrology, process engineering, or related semiconductor manufacturing experience.
Experience developing, sustaining, and optimizing metrology processes in a semiconductor manufacturing environment.
Experience supporting production, process development, equipment qualifications, and new product introductions.
Ability to work on-site in a semiconductor manufacturing and cleanroom environment.
Ability to provide off-hours support as needed for critical manufacturing or equipment issues.
Strong hands-on experience with thin-film and dimensional metrology, including: Ellipsometry Spectroscopy Reflectometry Profilometry WLI Nanospec
Strong understanding of film thickness, RI, uniformity, surface topography, step height, and feature dimension measurements.
Experience developing and optimizing measurement recipes, methods, and sampling strategies.
Experience with MSA, Gage R&R, tool matching, measurement correlation, and measurement system capability.
Strong background in SPC, DOE, process capability, statistical analysis, and root cause analysis.
Proficient with JMP, Excel, and other data analysis tools.
Experience analyzing manufacturing data and developing automated reports and process monitoring methods.
Strong analytical, troubleshooting, documentation, and communication skills.

Nice To Haves

Direct GaAs and/or InP semiconductor manufacturing experience.
Experience with high-volume semiconductor manufacturing.
Experience with additional metrology technologies including CD-SEM, AFM, four-point probe, Surfscan, overlay, and automated defect inspection.
Experience with MES, automated recipe management, SECS/GEM, FDC, or other semiconductor manufacturing automation systems.
Experience with SQL, JMP scripting, Excel automation, Python, or similar tools for automated data analysis and reporting.
Familiarity with device-level impacts of measurement results and semiconductor process integration.

Responsibilities

Serve as the process owner for semiconductor metrology, developing, sustaining, and optimizing measurement methods for production and process development.
Develop and optimize measurement recipes for ellipsometry, spectroscopy, reflectometry, profilometry, WLI, Nanospec, and other metrology systems.
Develop measurement methods for film thickness, RI, surface topography, step height, feature dimensions, wafer bow, and other critical process parameters.
Establish appropriate measurement locations, sampling plans, and measurement strategies to ensure accurate and representative process data.
Apply SPC, DOE, and statistical analysis to monitor and improve measurement and manufacturing processes.
Work cross-functionally with photo, etch, thin films, wet process, integration, R&D, and production teams to develop measurement solutions and troubleshoot process issues.
Serve as the technical owner for ellipsometry, spectroscopy, reflectometry, profilometry, WLI, Nanospec, and associated metrology equipment.
Lead troubleshooting efforts for measurement excursions, equipment issues, recipe problems, and measurement correlation.
Support equipment qualification, calibration, preventive maintenance, tool matching, and continuous improvement activities.
Develop and maintain tool-to-tool correlation and matching strategies across metrology systems.
Work with equipment vendors and maintenance personnel to improve measurement performance, reliability, and uptime.
Support evaluation, selection, installation, and qualification of new metrology equipment.
Develop and execute MSA and Gage R&R studies to evaluate measurement repeatability, reproducibility, accuracy, and capability.
Evaluate tool-to-tool correlation, operator effects, measurement sensitivity, sampling strategies, and other sources of measurement variation.
Establish measurement specifications, control limits, and monitoring methods.
Ensure measurement systems are capable of supporting process specifications, SPC, process capability analysis, and manufacturing requirements.
Identify and reduce sources of measurement variation to improve confidence in manufacturing data.
Support automated recipe download and verification for production metrology equipment.
Work with automation and equipment teams to ensure correct recipe selection, parameter control, lot/wafer tracking, and data collection.
Develop and maintain measurement limits, alarms, and fault detection rules.
Review equipment and measurement data to identify trends, excursions, and early indicators of process or equipment issues.
Support automated data collection, reporting, traceability, and integration with MES and manufacturing systems.
Use metrology data to support root cause investigations, process characterization, yield improvement, and defect reduction.
Develop and implement improvements to increase measurement capability, reduce variation, and improve manufacturing control.
Support new product introductions, process qualifications, and technology transfers.
Develop and maintain measurement procedures, work instructions, specifications, control plans, and MSA documentation.
Train technicians and junior engineers on metrology equipment, measurement methods, troubleshooting, and best practices.