Photolithography Process Engineer

CoherentSherman, TX
Onsite

About The Position

Primary Duties & Responsibilities: Develop, optimize, and maintain photolithography processes for GaAs and InP wafer fabrication. Support production using i-line, DUV, electron beam lithography, contact aligners, and coat/develop systems. Develop, optimize, and maintain production recipes while supporting automated recipe download, recipe verification, and process standardization. Troubleshoot process issues and identify root causes to improve yield and product performance. Design and execute experiments to improve lithography performance, process capability, and manufacturability. Monitor and optimize critical process metrics, including CD, overlay performance, and tool-specific process parameters. Monitor equipment health and process performance using SPC, fault detection, and equipment data to identify trends and prevent process excursions. Work with cross-functional teams to ensure successful integration of lithography with etch, deposition, and other manufacturing processes. Partner with equipment, automation, and manufacturing engineers to improve equipment reliability, recipe control, and overall process capability. Analyze process data using SPC and statistical software to maintain stable, capable processes. Develop process documentation, operating procedures, engineering reports, and process specifications. Support equipment qualifications, process transfers, and new product introductions. Mentor technicians and junior engineers as needed.

Requirements

  • Bachelor's degree in Engineering, Materials Science, Physics, or a related technical field.
  • At least 5 years of semiconductor photolithography process engineering experience.
  • Experience processing GaAs and/or InP wafers in a manufacturing environment.
  • Hands-on experience as a process owner and/or equipment owner for i-line, DUV, contact aligner, or electron beam lithography systems.
  • Strong understanding of photolithography fundamentals, including resist processing, focus and exposure optimization, alignment strategies, and process window development.
  • Experience using CD and overlay metrology to monitor and improve lithography performance.
  • Experience with MES, SECS/GEM, recipe download, or factory automation systems.
  • Experience with fault detection and classification (FDC), advanced process control (APC), or equipment health monitoring.
  • Familiarity with DOE, SPC, and process capability analysis.
  • Proficiency creating database queries, automated reports, or data analysis tools using JMP, Minitab, Excel, SQL, Python, or similar software.
  • Demonstrated ability to manage multiple projects and priorities in a fast-paced manufacturing environment.
  • Strong analytical and troubleshooting skills with the ability to solve complex manufacturing problems.
  • Excellent communication skills and the ability to work effectively with cross-functional teams.

Responsibilities

  • Develop, optimize, and maintain photolithography processes for GaAs and InP wafer fabrication.
  • Support production using i-line, DUV, electron beam lithography, contact aligners, and coat/develop systems.
  • Develop, optimize, and maintain production recipes while supporting automated recipe download, recipe verification, and process standardization.
  • Troubleshoot process issues and identify root causes to improve yield and product performance.
  • Design and execute experiments to improve lithography performance, process capability, and manufacturability.
  • Monitor and optimize critical process metrics, including CD, overlay performance, and tool-specific process parameters.
  • Monitor equipment health and process performance using SPC, fault detection, and equipment data to identify trends and prevent process excursions.
  • Work with cross-functional teams to ensure successful integration of lithography with etch, deposition, and other manufacturing processes.
  • Partner with equipment, automation, and manufacturing engineers to improve equipment reliability, recipe control, and overall process capability.
  • Analyze process data using SPC and statistical software to maintain stable, capable processes.
  • Develop process documentation, operating procedures, engineering reports, and process specifications.
  • Support equipment qualifications, process transfers, and new product introductions.
  • Mentor technicians and junior engineers as needed.
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