System Particle Control Hardware Engineer/Scientist – Semiconductor Equipment

Axcelis Technologies•Beverly, MA

32d•$130,800 - $196,200•Onsite

About The Position

Axcelis Technologies develops innovative capital equipment for the semiconductor industry. Our Platform Controls team develops control architectures, industrial automation solutions, and advanced control algorithms that enable reliable, high-performance operation of complex subsystems. This exciting hands-on role for Particle Control Hardware Engineer/Scientist reporting into Technology Development organization is responsible for designing and developing hardware solutions to minimize particle and contamination on Axcelis implantation systems. This role focuses on designing, testing and qualifying components within Axcelis tools by applying mechanical engineering, surface engineering, material interaction chemistry and particle transport physics. The role requires extensively cross-functional collaboration with process engineering, design engineering, equipment engineering and field support teams to identify particle and metal contamination sources, implement corrective actions, and improve tool performance in lab and at customer sites across the world.

Requirements

Master or PhD in Mechanical Engineering, Aerospace Engineering, Materials Engineering, Manufacturing Engineering or equivalent areas.
3-10 years of hardware development experience in semiconductor manufacturing, semiconductor equipment, vacuum systems, or contamination-sensitive industries.
Demonstrated hands on working experience operating sophisticated systems similar to semiconductor equipment.
Working level understanding of contamination control and particle generation mechanisms.
Experience with cleanroom operations (ISO Class 1-5 preferred)
Experience with vacuum system design
Experience with precision mechanical assemblies
Experience with wafer handling systems
Experience with root cause analysis methodologies
Experience with statistical process control (SPC)
Proficiency in CAD software (CREO or similar) and engineering documentation practices.
Working experience with statistical analysis techniques and software.
Experience working with suppliers on technology development.
Able to work in a lab environment and assist with hardware installations.
Able to work collaboratively in a fast paced environment.
Strong communication and presentation skills.

Nice To Haves

Knowledgeable with graphite, graphite surface treatments, semiconductor chamber shield design.
Knowledgeable in typical particle types in semiconductor systems and mitigation methods.

Responsibilities

Conduct root cause investigations for particle-related yield excursions and defectivity issues with hands on testing and analysis using advanced metrology systems such as particle counters, SEM/EDX, VPD ICP-MS, optical inspection.
Design precision mechanical components for the system specifically in key modules affecting particle performance.
Develop materials, coatings, seals, and surface finishes suitable for ultra-clean applications.
Perform mechanical analysis to reduce particle generation from wear, friction, vibration, and system interfaces.
Utilize PLM, CAD, and FEA tools. Specific knowledge of Windchill, Creo and Ansys.
Interface with customers and suppliers regarding contamination specifications and corrective actions.
Support audits, customer inquiries, and technical problem-solving activities.
Travel internationally as required to support customer upgrades and testing (10-25%).