Vacuum System Engineer

ASML • Wilton, CT

3d • Hybrid

About The Position

ASML is seeking a Vacuum Systems Engineer to join our Wilton, Connecticut location in the Defectivity Module Delivery Unit (MDU). Within ASML, the Development and Engineering (D&E) sector is responsible for the specification and design of ASML products throughout a product lifecycle. The Defectivity MDU department is responsible for creating and maintaining the critical environment, including molecular and particle cleanliness, within the vacuum reticle modules inside cutting-edge Extreme Ultraviolet (EUV) lithography machines. As a Vacuum Systems Engineer, you will play a key role in enabling next-generation EUV lithography by creating contamination-free vacuum environments for some of the world's most advanced semiconductor manufacturing systems. In this role, you will help model and design gas flow from atmosphere to deep vacuum, select appropriate materials, and design cleanliness processes that support vacuum-grade performance in scanner and test-rig environments. The solutions developed in this role directly impact wafer yield, machine availability, and customer productivity.

Requirements

• BS degree in a technical field and 5+ years of thorough experience; MS or PhD preferred (for JG08).
• BS degree in a technical field and 9+ years of substantial experience; MS or PhD preferred (for JG09).
• Education above a BS can compensate for years of experience depending on the candidate.
• Solid theoretical and practical experience with vacuum and gas-flow phenomena and applications, preferably in the semiconductor industry.
• Ability to specify vacuum systems, gas flows, pump-down and vent procedures, and architecture requirements for scanner and test-rig environments.
• Knowledge of molecular and particle cleanliness, surface particulate behavior, vacuum-grade cleanliness, materials compatibility, desorption issues, and contamination troubleshooting.
• Ability to plan and execute tests and DOEs, analyze measurement results, perform pressure-drop and flow budgeting, and use evidence to make practical recommendations.
• Ability to document standards, procedures, requirements, test evidence, and component specifications in Technical Product Documentation and present findings to varied technical audiences.
• Demonstrate strong technical writing and communication skills.
• Translates technical goals into clear priorities and delivers committed outcomes with quality and ownership.
• Works across disciplines, suppliers, and stakeholders to align expectations, resolve issues, and transfer knowledge between ASML units.
• Seeks and applies feedback, adapts approach, and improves collaboration in complex or ambiguous environments.
• Respects and integrates diverse perspectives to strengthen decision quality and inclusive execution.
• Establishes clear goals, roles, accountability, and ways of working while coaching others as applicable.
• Connects technical direction to business priorities and helps teams stay focused through ambiguity and change.
• Demonstrates high energy, self-motivation, quick learning, flexibility, and the ability to handle multiple projects and tasks concurrently with minimal guidance.
• This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work.

Nice To Haves

• Internal candidates familiar with Twinscan and vacuum systems ADT, vacuum systems hands-on architecture knowledge, or ASML vacuum system flow modeling will be given priority for hire.
• Experience with particle transport in flows, rarefied gas flow, plasma physics, electrostatics, surface science, RGA or other vacuum measurement techniques, and calculations or simulations for gas-flow and particle transport.
• Experience using modeling or simulation tools to predict gas flow, vacuum performance, contamination transport, or thermal-fluid behavior is highly desirable.

Responsibilities

• Work closely with Veldhoven machine conditioning architects, Defectivity MDU architects and leadership to specify vacuum systems and gas flows in scanners and test rigs.
• Partner with hardware project teams and lead designers to ensure vacuum and gas-flow requirements are successfully integrated throughout the product development lifecycle.
• Lead the ASML Wilton Engineer guild for machine conditioning architecture and vacuum systems competence onsite.
• Translate the overall system design into a gas-flow and vacuum architecture that meets system requirements.
• Specify vacuum system components, standards, and procedures and ensure they are properly recorded in Technical Product Documentation (TPD).
• Define, model, and execute qualification tests to verify that the architecture or subsystem performs all specified functions and meets all performance and design requirements.
• Support resolution of particle contamination issues through analysis and specification of flushing and venting procedures.
• Specify pump-down and vent procedures that ensure common flow performance.
• Participate in design reviews for test rigs and support functional integration of architectures or subsystems.
• Execute design of experiments for degassing chambers and components on product and process levels.
• Provide surface particulate and vacuum-grade cleanliness support, hands on troubleshoot escalations, and contribute practical recommendations from analysis.
• Transfer vacuum systems knowledge between ASML units and frequently interact with D&E Delivery Teams, functions, competences, customer support, and research.
• Perform analyses and calculations to predict flow architecture or subsystem functionality, including pressure-drop budgeting, flow budgeting, humidification, and gas purity.
• Take direction from ASML System Architects and principal engineering mentors leading critical large-capital-equipment development efforts.
• Follow EHS policies and proactively identify, communicate, and mitigate safety risks.

Benefits

• Work on technology that enables the world’s leading semiconductor manufacturers.
• Solve highly complex multidisciplinary engineering challenges.
• Collaborate with globally recognized experts in vacuum technology, contamination control, and lithography.
• Influence future EUV and High-NA technology platforms.
• Grow through technical leadership, mentoring, and cross-site collaboration opportunities.

What This Job Offers

• Job Type: Full-time
• Career Level: Mid Level