Sr. Development Engineer, Electrostatic Chuck

Axcelis Technologies•Beverly, MA

6d•Onsite

About The Position

We are seeking a highly experienced and technically driven Senior Development Engineer to lead the development, productization, and support of electrostatic chucks and related subsystems for Axcelis Purion ion implantation systems. This role requires expertise in electrostatic chuck technologies, associated control systems (including power supplies and heater controllers), surface coatings, and wafer particle/contamination management. The engineer will own ESC development from concept through production qualification, working closely with cross‑functional teams and external suppliers to deliver robust, high‑performance solutions.

Requirements

Experience in electrostatic chuck development for semiconductor wafer processing equipment.
Strong working knowledge of coating technology and materials characterization
Strong understanding of semiconductor vacuum systems and wafer processing fundamentals.
In-depth knowledge of high-voltage electrical systems and ESC controls architecture.
Proven experience with product lifecycle management (PLM), CN/ECO release processes, and related tools.
Demonstrated ability to manage and collaborate with domestic and international suppliers.
Working knowledge of applicable safety and compliance standards (UL, IEC, NFPA, SEMI).
Excellent written and verbal communication skills with strong cross-functional collaboration capabilities.
Working knowledge of structured problem solving methods.
Ability to thrive in a fast-paced, hands-on development environment.
Willingness and ability to work in a cleanroom environment.
Ability to work onsite at the Beverly, MA location 3-5 days per week.
Minimum 5+ years in electrostatic chuck development in a leading semiconductor equipment company.

Nice To Haves

Working experience with CAD packages such as CREO/Windchill
Matlab, Python or equivalent
JMP, Mini-tab or equivalent statistical data analysis programs
Working knowledge of materials characterization techniques

Responsibilities

Own ESC development activities from design through production qualification.
Lead change notices (CNs), engineering change orders (ECOs), and related PLM processes.
Drive ESC testing, validation, and qualification activities.
Lead particle and metals Continuous Improvement Projects (CIPs).
Develop and maintain comprehensive technical documentation.
Provide expert-level field support for ESC-related issues.
Lead root cause analysis and resolution of field issues.
Perform on-tool testing and validation activities in support of issue resolution.
Partner with suppliers on ESC corrective and preventive actions.
Collaborate with technology development teams to define production requirements for suppliers.
Support coating supplier development and qualification efforts.
Conduct new supplier audits and ongoing supplier evaluations.
Drive ESC CIPs in collaboration with key suppliers.
Work closely with controls teams on ESC chuck/dechuck functionality and thermal (heating/cooling) control systems.
Present technical data, analysis, and recommendations to executive leadership and customers.
Collaborate effectively across engineering, manufacturing, quality, and supply chain teams.