Process Engineer - Ion Implant

Axcelis Technologies•Beverly, MA
•$80,006 - $120,009

About The Position

The Process Engineer supports the characterization, documentation, and application of ion implant equipment to meet customer and product requirements. Acting as an internal customer interface, the role works with engineering, marketing, and field teams to support product development and release. It focuses on executing tool characterization activities, analyzing performance data, supporting customer engagements and demonstrations, and collaborating across functions under established technical direction. The position supports ion implant tool operational parameter definition and maintenance, characterization planning and execution, data package and Best Method documentation upkeep, and evaluation of hardware or procedural changes. It also gathers and analyzes installed-base performance information, including repeatability, stability, particle performance, uptime, and SPC-related metrics. The engineer assists with customer demonstrations through recipe setup, wafer processing, system qualification, and reporting; contributes to operating specifications and competitive performance data; and supports application development and engineering evaluations for hardware or software upgrades.

Requirements

  • Bachelor’s degree in Electrical Engineering, Physics, Materials Science, Chemical Engineering, or a related field.
  • 0–3 years of experience in semiconductor processing, equipment engineering, or a related technical role.
  • Basic understanding of SPC, data analysis, and experimental methodology.
  • Ability to document technical results clearly and communicate effectively with cross-functional teams.
  • Willingness to learn hands-on tool operation and support customer-facing activities.

Nice To Haves

  • Familiarity with ion implant concepts such as dose, energy, species, and uniformity, or with other semiconductor process tools.
  • Ability to program basic engineering functions in JMP, Minitab, or Matlab.

Responsibilities

  • Support the definition and maintenance of ion implant tool operational parameter spaces based on technical requirements and customer use cases.
  • Define and execute characterization plans to evaluate tool performance across specified operating conditions.
  • Identify gaps in characterization data and documentation and contribute to plans to address them.
  • Generate and maintain data packages describing the operational window of assigned tool sets based on released machine specifications.
  • Organize and update characterization data, reports, and Best Method documentation for internal, marketing, and customer-facing teams.
  • Support evaluation of new hardware or procedural changes and related characterization and documentation updates.
  • Collect and maintain information about installed customer tools, including process applications, technology nodes, and production status.
  • Gather and analyze performance data, including repeatability, stability, particle performance, uptime, and SPC-related metrics, and document trends and observations.
  • Support customer interactions to identify tool performance concerns or process limitations requiring further analysis or characterization.
  • Assist Systems Engineers and Equipment Engineers with customer tool demonstrations.
  • Review customer technical requirements and support feasibility assessments under guidance.
  • Provide hands-on support for recipe setup, wafer processing, and system qualification before customer wafer runs.
  • Help ensure tool operation aligns with defined demonstration requirements, contribute to demonstration reports, and assist with follow-up actions.
  • Communicate characterization results and tool performance findings to Marketing, Systems Engineering, and Engineering teams.
  • Support documentation and updates to operating specifications for new processes, applications, or tool configurations.
  • Assist with collecting and organizing competitive performance data for product positioning.
  • Support identification of new tool applications through customer feedback, marketing input, and technical literature review.
  • Participate in customer joint-development or evaluation activities under defined project scope.
  • Assist engineering teams with data collection and analysis for hardware or software upgrades, and share application and characterization results with relevant internal teams.

Benefits

  • Eligibility for the Axcelis Team Incentive bonus plan.
  • Comprehensive benefits package for regular employees working 20 or more hours per week.
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