Electron-Beam Lithography & Process Engineer

University of British Columbia • Vancouver, BC

1d • CA$7,284 - CA$10,474 • Onsite

About The Position

The Stewart Blusson Quantum Matter Institute (Blusson QMI) at UBC is a leading research institution focused on quantum mechanics in solid-state systems. They have invested in a state-of-the-art JEOL JBX-8100FS 100 kV electron-beam lithography tool for nanoscale device fabrication. The Electron-Beam Lithography & Process Engineer is the senior expert responsible for this tool, managing its operations, technical aspects, and client interactions. The role ensures the JBX-8100FS functions optimally as a revenue-generating asset, supporting Blusson QMI's research mission by providing high-resolution patterning services to internal and external partners through fee-for-service contracts. While the primary focus is on the JBX-8100FS, the Engineer will also contribute technical expertise to academic research projects. The role involves planning, designing, and delivering micro- and nano-fabrication solutions for multiple projects, working independently and collaboratively. A key aspect is advancing Blusson QMI's industry-service business model by translating partner requirements into manufacturable processes and interacting with high-level stakeholders. The Engineer must ensure all lab activities are conducted safely and in compliance with legislation and protocols, supporting the Institute's strategic shift towards a sustainable industry-service model and enhancing its reputation as a preferred partner for advanced technology companies.

Requirements

• Undergraduate degree in Engineering or Applied Science.
• Minimum of five years of related experience, or the equivalent combination of education and experience.
• Willingness to respect diverse perspectives, including perspectives in conflict with one’s own
• Demonstrates a commitment to enhancing one’s own awareness, knowledge, and skills related to equity, diversity, and inclusion
• Direct, hands-on experience in micro- and nano-device development.
• Experience developing and qualifying micro/nano-fabrication processes, with a portfolio of successfully fabricated devices that have had significant academic or industrial impact.
• Extensive hands-on expertise operating and maintaining a >50kv+high throughput electron-beam lithography system, such as the JEOL JBX-8100FS or equivalent vector-scan tool, with documented experience in process optimization, dose control, overlay, and sub-10 nm patterning for real-world device programs.
• Proven working knowledge and ownership of a broad range of complementary micro/nano-fabrication techniques, including photolithography, resist processing, wet and dry etching, and also physical and chemical vapour deposition.
• Demonstrated proficiency in device and process characterization using scanning electron microscopy, scanning probe microscopy, contact profilometry, and other metrology tools, with the ability to perform root-cause failure analysis and implement corrective/preventive actions that ensure repeatable outcomes.
• Strong safety awareness and commitment to cleanroom best practices.
• Proven ability to creatively solve complex engineering problems under tight timelines and resource constraints typical of client-driven projects.
• Excellent fault-finding and diagnostic skills for lithography tools, vacuum systems, and supporting instrumentation.
• Expertise with BEAMER software, or equivalent.
• Demonstrated ability to work effectively in a team environment while taking full ownership of technical deliverables.
• Strong client-facing communication skills, with the ability to present complex technical concepts, risks, and solutions clearly to non-specialist industry stakeholders (C-level, VPs, and principal engineers) through proposals, reports, and review meetings.
• Demonstrated track record of contributing to facility or team revenue growth through process standardization, service expansion, or successful delivery of fee-for-service-based nanofabrication work.

Nice To Haves

• Degree in Engineering, Applied Science, Physics, Chemistry, or a closely related discipline.
• A graduate degree is strongly preferred.
• The successful candidate will be a recognized expert in high-resolution electron-beam lithography with a proven track record of delivering functional, yield-critical devices in academic/industrial or commercial R&D environments.
• Direct experience with the JEOL JBX-8100FS (or equivalent 100 kV system) in a service or foundry-like setting, including tool qualification, preventive maintenance, and client-facing process delivery.
• Proven experience in a core facility, foundry, or service-oriented environment serving external industrial clients, including the ability to manage multiple concurrent paid projects under commercial constraints (deadlines, budgets, IP protection).
• Proficiency with Linux-based operating systems, scripting, and software-hardware interfacing for lithography tool control.
• Experience managing multi-stakeholder, NDA-protected projects with external industrial partners (C-level, VP, or principal-engineer engagement).
• Track record of published research or patents in micro- and nanofabrication.
• Knowledge of high-end lithography software suites and advanced process-integration strategies for quantum, photonics, or advanced semiconductor devices.
• Direct experience developing and delivering fee-for-service or contract-based nanofabrication projects for commercial partners, including RFQ response and client project management.
• Familiarity with industry-standard practices for NDAs, statements of work, intellectual-property handling, and commercial project governance.

Responsibilities

• Monitors, optimizes, and maintains all JEOL JBX-8100FS-enabled processes to ensure they remain within specification, proactively engineering interventions, preventive maintenance schedules, and performance metrics that maximize tool uptime and deliver consistent results for paid client work.
• Acts as the single point of accountability for the JEOL JBX-8100FS across all operational, technical, and client-facing dimensions—including tool performance qualification, user (and client) training, scheduling, and direct liaison with industrial partners—to guarantee reliability, consistency, and on-time delivery of commercial device programs.
• Supports the full process specification and execution for innovative micro- and nano-structured devices using the JEOL JBX-8100FS and complementary techniques (photolithography, wet/dry etching, PVD/CVD, electroforming, soft lithography, and advanced metrology).
• Develops and qualifies production-worthy process flows that meet exacting device-performance and yield targets for academic and commercial partners.
• Advises on the design and feasibility of engineering design aspects of various research projects for a wide range of internal and external stakeholders.
• Simultaneously drives multiple high-value projects, developing proprietary micro/nano-technologies on the JEOL JBX-8100FS, then successfully transferring those technologies and processes to internal teams and external industrial clients under NDA and fee-for-service-driven contracts.
• Serves as the senior technical advisor to internal and external stakeholders (including C-level, VP, and principal engineers at partner companies) on the design, feasibility, cost, and timeline of micro/nano-engineering solutions, providing clear risk assessments and alternative process pathways that align with real-world device-development requirements.
• Designs, develops, and qualifies novel capabilities and process modules on the JEOL JBX-8100FS and related nanofabrication equipment delivering innovative technologies for a number of different projects; independently designs and executes complex experiments to solve high-impact engineering challenges in resolution, overlay, dose control, and process integration for a wide range of internal and external stakeholders.
• Is an integral part of the ANF team that supports cleanroom operations, and proactive adoption of new processes that expand Blusson QMI’s service portfolio and competitive advantage in the industry market.
• Provides expert support, time, and specialized knowledge to Blusson QMI labs and strategic projects as directed by the Facilities Director, while contributing to additional tasks that advance Blusson QMI’s mission of delivering world-class, nanofabrication services.
• Will also be responsible for planning, design, specification, construction, installation, and maintenance of other scientific research equipment within the ANF.

Benefits

• Employment equity helps achieve inclusion and fairness, brings rich diversity to UBC as a workplace, and creates the necessary conditions for a rewarding career.

What This Job Offers

• Job Type: Full-time
• Career Level: Senior