EUV Lithography Pathfinding Engineer- TPG

Micron TechnologyBoise, ID
3d

About The Position

In this role, you will need to have strong semiconductor pathfinding skills in an R&D department specific to High NA EUV and photolithography. Develop EUV modules in our technology development (TD) site. Collaborate with manufacturing sites to align on equipment and materials requirements, and to make sure EUV processes are aligned for transfer. ### Deep understanding of EUV lithography, including differences between EUV lithography and deep ultraviolet (DUV) lithography. Technical understanding of 193nm immersion multiple patterning processes, including litho-etch-litho-etch (LELE) and self-aligned quadruple patterning (SAQP). Knowledge of optics for photolithography or experience with photolithography simulation software such as Prolith or S-Litho. Demonstrated ability to define and drive roadmaps internally and with vendor partners.

Requirements

  • M.S. or Ph.D. in Engineering, Chemistry, Physics, or study relevant to Photolithography with 10 years semiconductor process related experience; or a B.S. in Engineering, Chemistry, or Physics with at least 15 years semiconductor process related experience with emphasis on Photolithography will be considered.
  • Strong written and verbal communication skills.
  • Proven statistical data analysis capabilty; expertise in JMP or Python
  • Deep understanding of EUV lithography, including differences between EUV lithography and deep ultraviolet (DUV) lithography.
  • Technical understanding of 193nm immersion multiple patterning processes, including litho-etch-litho-etch (LELE) and self-aligned quadruple patterning (SAQP).
  • Knowledge of optics for photolithography or experience with photolithography simulation software such as Prolith or S-Litho.

Responsibilities

  • Develop EUV modules in our technology development (TD) site.
  • Collaborate with manufacturing sites to align on equipment and materials requirements, and to make sure EUV processes are aligned for transfer.
  • Define and drive roadmaps internally and with vendor partners.
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