EUV Lithography Process Development Engineer- TPG

Micron Technology • Boise, ID

3d

About The Position

Develop EUV modules in our technology development (TD) site. Work closely with defect inspection teams and our mask shop to develop appropriate inspection strategies for EUV masks. Collaborate with manufacturing sites to align on equipment and materials requirements, and to make sure EUV processes are aligned for transfer. Understanding of EUV lithography, to include understanding differences between EUV lithography and deep ultraviolet (DUV) lithography. Knowledge and an understanding of 193nm immersion multiple patterning processes, including litho-etch-litho-etch (LELE) and self-aligned quadruple patterning (SAQP). Knowledge of optics for photolithography or experience with photolithography simulation software such as Prolith or S-Litho is helpful.

Requirements

• Understanding of EUV lithography, to include understanding differences between EUV lithography and deep ultraviolet (DUV) lithography.
• Knowledge and an understanding of 193nm immersion multiple patterning processes, including litho-etch-litho-etch (LELE) and self-aligned quadruple patterning (SAQP).
• Degree/Major: M.S. or Ph.D. in Engineering, Chemistry, Physics, or study relevant to Photolithography plus at least 3 years of semiconductor industry experience ; or a B.S. in Engineering, Chemistry, or Physics with 10+ years of semiconductor industry process related experience with emphasis on Photolithography
• Hands on industry experience with High NA EUV in a pathfinding settting.
• Coursework or proven experience showing strong statistical analysis skills, including design of experiments and data analysis.
• Strong written and verbal communication skills.

Nice To Haves

• Knowledge of optics for photolithography or experience with photolithography simulation software such as Prolith or S-Litho is helpful.
• Experience with JMP, Python, or other statistical analysis software is helpful

Responsibilities

• Develop EUV modules in our technology development (TD) site.
• Work closely with defect inspection teams and our mask shop to develop appropriate inspection strategies for EUV masks.
• Collaborate with manufacturing sites to align on equipment and materials requirements, and to make sure EUV processes are aligned for transfer.

What This Job Offers

• Job Type: Full-time
• Career Level: Mid Level