Equipment Engineer, Plasma Etching and Ion Milling, Microelectronics Research Center

University of Texas at Austin•Austin, TX

2d•$90,000•Onsite

About The Position

The Microelectronics Research Center (MRC) laboratories serve users from both universities and corporations across many different fields: electronics, optics, physics, chemistry and astronomy, as well as chemical, mechanical and petroleum engineering. The MRC is more than a clean room with a comprehensive set of advanced nano-fabrication equipment; it is a community of scientists who work together to build advanced technology products and knowledge. UT Austin offers a competitive benefits package that includes: 100% employer-paid basic medical coverage Retirement contributions Paid vacation and sick time Paid holidays Please visit our Human Resources (HR) website to learn more about the total benefits offered. Purpose The Etch Engineer leads development, optimization, and sustainment of advanced etch processes in a shared-user research cleanroom and is responsible for the performance, reliability, and sustainment of dry etching equipment, including plasma etching systems (RIE, ICP), atomic layer etching (ALE) tools, and ion milling systems, in a shared‑user cleanroom environment. This role is expected to work as part of a team to ensure optimal tool performance by maintaining tool stability, uptime, safety, and repeatability through calibration, diagnostics, preventive maintenance support, and hardware troubleshooting. The engineer supports advanced microfabrication research and prototyping by ensuring etch tools operate within defined performance specifications and safety requirements, while working closely with process engineers, technicians, vendors, and users for recipe development, experimental design, data analysis, user training, and equipment diagnostics.

Requirements

Bachelor’s degree in Electrical Engineering, Mechanical Engineering, Materials Science, Physics, or a related field.
Minimum of 3 years of experience supporting semiconductor or microfabrication equipment, preferably plasma etching, ALE, or ion milling systems.
Strong understanding of etch tool subsystems, including RF power delivery, plasma sources, vacuum systems, gas delivery, temperature control, and motion systems.
Strong understanding of etch chemistry and process physics.
Demonstrated experience with equipment diagnostics, troubleshooting, and component-level repair.
Familiarity with cleanroom operations, vacuum systems, and hazardous gas safety infrastructure.
Relevant education and experience may be substituted as appropriate.

Nice To Haves

Master's degree in Electrical Engineering, Mechanical Engineering, Materials Science, Physics, or a related field.
Experience supporting RIE, ICP, ALE, or ion milling tools in a research, pilot-line, or shared-user cleanroom environment.
Familiarity with etch performance metrics (e.g., stability, repeatability, endpoint behavior) from an equipment performance perspective.
Experience interfacing with vendors for service, upgrades, and performance optimization.
Training or certification in emergency response protocols for hazardous gas incidents.
Exposure to data analysis or scripting tools (e.g., Python) for equipment monitoring or performance trending.
Prior work in a shared-user research facility or academic cleanroom environment.
Demonstrated experience mentoring junior staff in technical or cleanroom environments.

Responsibilities

Equipment Performance and Sustainment Maintain and optimize the performance and availability of plasma etching, ALE, and ion milling tools to meet facility uptime and capability targets. Troubleshoot process deviations and tool-related issues using structured root cause analysis. Monitor and control key equipment performance metrics, including plasma stability, RF power delivery, pressure control, gas flow accuracy, temperature control, and endpoint system performance. Perform routine equipment calibration, matching, and performance verification to ensure repeatable and stable operation. Perform diagnostic testing and hardware troubleshooting in coordination with maintenance staff and vendors. Support tool qualification, calibration, acceptance testing, and preventive maintenance activities.
Diagnostics, Troubleshooting, and Repair Diagnose and resolve equipment-related issues impacting etch performance using structured troubleshooting and root cause analysis. Perform hands-on hardware diagnostics and repairs, including replacement of boards, RF components, sensors, valves, vacuum hardware, and mechanical assemblies. Coordinate with vendors and service providers on advanced repairs, corrective maintenance, upgrades, and system modifications. Support planning and execution of preventive maintenance activities to minimize downtime and performance drift.
Process Development and Optimization Assist users to develop, optimize, and document etch processes for a wide range of device structures and materials as needed. Assist users in designing and executing experiments to push tool and process limits in resolution, sidewall quality, and pattern fidelity. Assist users in etch optimization through systematic experimentation and modeling.
Process Awareness and Metrology Support Support process engineers and users by ensuring tools are properly configured and capable of meeting process requirements Utilize metrology data (e.g., SEM, profilometry, ellipsometry, endpoint signals) to validate equipment performance and identify hardware-related trends. Assist with tool qualification, requalification after maintenance, and acceptance testing for new or upgraded systems. Analyze etch and metrology data to support process control and reproducibility. Correlate etch results with up and downstream lithography or deposition outcomes to optimize process results.
Safety Systems and Compliance Oversee equipment-related safety systems associated with toxic and corrosive process gases (e.g., Cl₂, CF₄, SF₆), including gas cabinets, interlocks, exhaust, scrubbers, and leak detection systems. Ensure etching equipment operates in compliance with institutional, regulatory, and cleanroom safety standards. Participate in safety reviews, hazard analyses, and emergency response planning related to etch tool operation.
Documentation and Operational Readiness Develop and maintain equipment-focused documentation, including operating procedures, maintenance records, calibration logs, and performance baselines. Track tool configuration changes, service history, and hardware modifications. User training related to equipment operation, tool limitations, and safe use practices. Provide technical consultation to researchers on etch strategy, design rules, and integration considerations.
Collaboration and Integration Work closely with researchers, engineers, technicians, and integration teams to align equipment performance with research and process needs. Support downstream integration by ensuring etch tools perform consistently for lithography, deposition, and pattern transfer workflows. Contribute to facility planning for tool upgrades, capacity expansion, and long-term equipment lifecycle management. Collaborate with other process engineers, technicians, and researchers to support process transfer, yield improvement, and multi-step process integration. Participate in interdisciplinary projects involving lithography, metrology, etching, and deposition.