SENIOR PROCESS ENGINEER, DRY ETCH

Coherent • Sherman, TX

268d • $92,000 - $150,000

About The Position

The Senior Process Engineer, Dry Etch will lead the development and optimization of dry etch processes (ICP, RIE) for compound semiconductor applications. This role involves driving process integration and improvement initiatives to enhance device performance and yield. The engineer will define and control etch process parameters for GaAs and InP substrates, ensuring precision, uniformity, and repeatability. Advanced metrology tools such as SEM, AFM, ellipsometry, profilometry, XPS, XRD, and optical interferometry will be utilized for process characterization and defect analysis. Collaboration with integration, production, and device engineering teams is essential to integrate etch processes into the overall semiconductor fabrication flow. The engineer will troubleshoot process deviations, particle contamination, and chamber performance issues, implementing corrective actions and continuous improvement strategies. Establishing and maintaining Statistical Process Control (SPC) for process monitoring and optimization is also a key responsibility. The role includes evaluating and qualifying new etch chemistries, hardware configurations, and process automation tools, as well as developing and documenting process recipes, work instructions, and standard operating procedures (SOPs). Mentoring junior engineers and providing technical leadership in semiconductor dry etch and metrology is expected.

Requirements

• Bachelor's, Master's, or Ph.D. in Materials Science, Electrical Engineering, Physics, or related field.
• 10+ years of experience in semiconductor process engineering, specializing in dry etch (ICP, RIE).
• Strong background in etch chemistry, selectivity, anisotropy, and plasma physics for III-V semiconductor processing.
• Expertise in GaAs and InP processing, including device fabrication challenges and best practices.
• Hands-on experience with metrology tools such as SEM, AFM, ellipsometry, profilometry, and XPS.
• Strong problem-solving skills with experience in data analysis, SPC, and DOE (Design of Experiments).
• Ability to work in a cleanroom environment and interface with cross-functional engineering teams.

Nice To Haves

• Experience with high-volume semiconductor manufacturing or advanced R&D prototyping.
• Knowledge of metal etching, dielectric etching, and post-etch cleaning techniques.
• Familiarity with automation (SECS/GEM), scripting, or AI-driven process control.
• Demonstrated leadership in technical project management and team mentoring.

Responsibilities

• Lead the development and optimization of dry etch processes (ICP, RIE) for compound semiconductor applications.
• Drive process integration and improvement initiatives to enhance device performance and yield.
• Define and control etch process parameters for GaAs and InP substrates.
• Utilize advanced metrology tools for process characterization and defect analysis.
• Work closely with integration, production, and device engineering teams.
• Troubleshoot process deviations, particle contamination, and chamber performance issues.
• Establish and maintain Statistical Process Control (SPC) for process monitoring and optimization.
• Evaluate and qualify new etch chemistries, hardware configurations, and process automation tools.
• Develop and document process recipes, work instructions, and standard operating procedures (SOPs).
• Mentor junior engineers and provide technical leadership.

Benefits

• Competitive compensation program.
• Comprehensive career development platform.
• Stability, longevity, and growth opportunities.

What This Job Offers

• Job Type: Full-time
• Career Level: Senior
• Industry: Computer and Electronic Product Manufacturing
• Education Level: Bachelor's degree